Surface morphology、Dimension Measurement   表面形貌、尺寸量测 
Optical profiler, SEM, TEM     
 
Film type and thickness    薄膜类型及薄膜厚度 
SEM/EDS, TEM/EDS
 
Q-well structure    量子井结构分析 
SEM/EDS, TEM/EDS      
 
Defects (Dislocations)    缺陷分析     
TEM   
               
Q-Well Periodic Doping Profile  量子井周期掺杂分布
SIMS
 
Defect Isolation   缺陷定位 
EMMI、OBIRCH
 
Failure Analysis  失效分析
X-ray，SAM，EMMI，SEM，FIB，TEM
 
ESD Testing   静电测试
 

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